• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    This invention relates to high brightness mass spectrometry. The purpose of the invention is to increase the resolution and throughput by reducing the aberration of second-order holes. The mass spectrometer contains an ion source with an output beam and a block of transmitting optics, an electrostatic sector and magnetic analyzers. The magnitude of the angle between the longing of the input boundary of the magnetic analyzer and the normal to the ion-optical axis of the mass spectrometer on the side of the beam deflection and the beam deflection angle in the magnetic analyzer satisfy the ratio tg | -.tg (6-e). 2 The electrofocusing optics unit contains two electrostatic lenses located up to the source output shaft with a Focus in the radial plane in the output neck region and a slit lens located between them to create a particle beam parallel in the axial plane in the output slit region of the ion source. The block of electrofocusing optics after the exit slit of the ion source contains a focusing lens after the acceleration, the focus of which is a six-pole lens. The second six-pole lens is located after the electrostatic analyzer at the point of its Focus. A lens for feeding a magnetic particle analyzer parallel in the radial plane is made in the form of a square. 4 з.п, ф-л, 10 Il. SL O5 and 4 SP
    公开号:SU1600645A3
    申请号:SU853850145
    申请日:1985-01-25
    公开日:1990-10-15
    发明作者:Слодзиан Жорж；Коста Де Боргард Франсуа；Дэнь Бернар；Жирар Франсуа
    申请人:Оффис Насьональ Дъэтюд Э Де Решерш Аэроспасьаль О.Н.Э.Р.А. (Фирма)；Юниверситэ Де Пари-Сюд (Фирма)；
    IPC主号:
    专利说明:

    The invention relates to a separator for charged particles or a mass spectrum of high brightness, intended for the simultaneous detection and measurement of several elements.
    The aim of the invention is to increase the resolution and throughput
    ability by reducing the second-order aberration of the holes.
    FIG. 1 shows a diagram of a spectrometer according to the invention, a slit in the radial plane; this drawing shows two parallel beams arriving at different angles of incidence on the magnetic sectional system and two beams of corresponding

    cm
    nym energies; + ft. in (lig. 2 is a view of the device, similar to Fig. 1, but in addition, the separation in the same beam of particles possessing two different masses; in Fig. 3 is a section, illustrated in vertical section. The shape of the beam before its entrance electrostatic sector; in Fig. 4, a projection of the device Sa in 6G.1; in Fig. 5, a vertical sectional view illustrating (the shape of the handle in the direction it has 1 | 1H after the exit from the magnetic sector; 6a and 7 is the same as in FIG. 2 J5 3 on an enlarged scale, in FIG. 8 ian is a more accurate illustration of a part of the ijioro example, ying invention i ya 9 for this example proillyust- | th e operation of the instrument with posleusko- | eeniem;. in Figure 10 - the same, without po- leuskoreni.
    In contrast to mass spectrographs, in which a photographic plate is used as a final detector, mass spectrometers do not need just that — for their detection zone, the focal surface of the output of the magnetic sector was; flat.30
    At the input of the spectrometer, there is a unit 1 of transmission optics. The nature of the transfer depends on the characteristics of the particle beam fed to the input or from a point source of 2 particles. 35
    20
    25
    The transmitting optics unit 1 ends at the level of the entrance slit 3, which is the input of the spectrometer. As is well known, the spectrometer after the entrance slit 3 has an electrostatic sector 4, and then a magnetic sector 5-, in front of which an aperture slit 6 is installed. All this set of tools is intended to deflect the flow of particles in a radial plane that is perpendicular to the surface. - ru-entrance slit 3. This radial plane is the plane of Figures 1 and 2.
    It is known that the main element Q of a mass spectrometer is its magnetic sector 5, the scattering effect of which depends simultaneously. -and from the mass of part 1; 1, and from its energy. This scattering effect is expressed in that the trajectory of a particle takes the form of an arc of a circle whose radius depends on the mass and energy of the particle. It is also known from 5
    0
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    40 45 Q
    the combination of magnetic sector 5 with the preceding electrostatic sector 4, Electrostatic sector 4 also has a dissipative effect, but only depending on the energy of the particles. With a simultaneous action of both these sectors, the electrostatic sector compensates for the scattering effect of the magnetic sector, depending on the energy of the particles. Thus, in principle, at the output of the magnetic sector, there remains only a scattering effect, depending on the mass of the particles.
    The magnetic sector 5 is provided with the flat side of the entrance 7, placed at an angle to the axis of the particle beam, and the output side 8, also flat and lying in the plane passing through the intersection 9 (Figure 2) of the input side 7 with the axis of the particle beam. With this arrangement, the deflection angle remains the same regardless of the mass of the particles. This angle is twice the angle between the exit side 8 and the axis of the particle beam at the entrance of the magnetic sector 6. It follows that for a beam parallel to the entrance, the particles focus at the output of the magnetic sector in plane 10, which also passes through the intersection 9.
    To obtain a spectrometer with multiple detection and high brightness, as well as with high resolution, it is necessary to compensate for the various aberrations caused by the elements of the spectrometer and are considered each separately or in their combination.
    The first aberration is known as the aberration of the second-order hole of the magnetic sector. This type of aberration is due to the fact that two trajectories that are symmetrical with respect to the central trajectory at the entrance to the magnetic sector, after exiting this sector, intersect at a point that is not on the central trajectory. The displacement of this point relative to the central trajectory is proportional to the square of the angular deviation of each secant trajectory relative to the central trajectory (from which the second order a comes).
    The first aspect of the invention is to correct this type of second-order aberration at the level
    very g agnitnogo sector. Let us denote by position 11 the normal to the axis of the particle beam at the point where the bending of the trajectory, which was obtained under the influence of the magnetic sector 5, begins. The letter & let us designate the angle of deflection of the particle beam in the magnetic sector 5. The second-order aberration created by the magnetic sector for trajectories located in the radial plane is destroyed if these angles satisfy the following relation;
    tge / 2.tg (6-8) 2
    The invention relates to a mass spectrometer of very high Brightness, otherwise speaking to a device that senses a beam, the geometrical extent of which is very large, and is capable of simultaneous detection, due to which correction of aberrations becomes very difficult.
    According to the invention, it is recommended that the input side of the magnetic sector should have a corresponding slope so that the magnetic sector does not have aberrations of the second polymeric hole for all masses (for all beam trajectories that are spread-radial in the radial plane) S provided that the aberrations of the electrostatic sector have already been eliminated.
    The angle of inclination of the input side, depending on the angle b, the deviation of the magnetic sector is determined by the given, you;
    tg0 / 2.tg (e - 5) 2.
    3 magnetic we get about
    So, for the SM sector deviation, a miscellaneous 90,
    tgg 1/2, i.e. From 26.56
    This ratio was established on the basis of the coefficients of aberrations detected during experiments with magnetic sectors of various entities. By combining some coefficients, it is possible to establish the above ratio, which, if observed, turns out to be corrected aberrations of the second-order holes of the magnetic sector. This is precisely the basic position that has made it possible to correct these aberrations for any geometrical dimensions of the beam, which is absolutely necessary.
    mo, since the invention is pursuing,) the coverage of the widest possible beam of particles,
     Soup: there is a secondary effect, which is that the slope of the input side introduces the plane (Loss (0) of the magnetic field of the magnet (this was known before). JQ Using the above ratio allows correcting the aberrations of the magnet holes for the trajectories located in the radial plane, so5 that 15 remain with only aberrations introduced by the electrostatic sector, which can be corrected with a six-terminal device located in front of the magnetic sector 12. Such correction 0 hole aberrations The second order associated with the magnetic sector is in itself very important and, of course, can also be used in other types of spectrometers that differ from the details described here.
    The particle beam exiting the electrostatic sector 4 has a narrowing at point 13 (Figure 2). In order to obtain the optimal effect of the 30th first correction, after point 13, devices are introduced, due to which the magnetic sector receives a beam that is parallel to the radio plane. This is achieved with the help of one,; i.nn several four-terminal devices, such as 14, installed between the electrostatic sector 4. And the magnetic sector 5. One way to introduce one four-terminal 14 0 is such an installation, and its front main dioKyc coincides with the point 13 of the contraction. The position of the quadrupole 14 is chosen so that the inclination of each parallel 5 beam, corresponding to different energies and m, provides achromatic 4 | dropout at the level of features located in plane 10, simultaneously for all masses. This feature is located on dinr.l, where two parallel patches, corresponding to the energies V ± AV, and fFocusings in the same plane of plane 0 (for greater clarity, the ordinate 5 is not at all stretched). As will be seen in about 3 below, point 3 is a valid image input ;: Lupj; n 3, created by the electrostatic sector in the radial plane. Similarly, on the yig, 2 in the ralial plane, a parallel beam was shown at its exit from the four pole pole 14.
    On-FIG. 4 shows that the fan pole 14 in vertical section,
    on the contrary, it has a dispersing effect. This scattering action, in turn, is coen- sized by an electrostatic slit 15, Thus, at the output of this lens, a parallel beam of particles appears that passes exactly through the smaller size of the slit of the opening 16,
    If we now return again to the examination of n, 2, then it is molar to see that the parallel navel (shown for simplicity as a single beam with average energy) S, issued by a quadrupole 14 in the radial plane, passes without change through the slit lens 15, in order, then enter inside the large-sized slit hole. 16, Comparison with (lig.1. Shows that the large size of the hole 16 provides for the passage of parallel beams with different chromatic deviations coming from the quadrupole 14, taking into account the dispersion of energy, supersity between the microstatic sector 4 and magnetic sector 5.,
    Eventually, the particle beam becomes parallel in its two transverse directions after the lens lens 15 and up to the entrance side of the magnetic sector 5,
    It is known that the electrostatic sector 4 and the magnetic sector 5 each have their own center of chromatic time of adhesion (the adjective chromatic is used here for connection with energy dispersion). Particles, barely
    blowing along the central pathway prior to their entry into the electrostatic sector and having energy slightly different from. the nominal beam energy will exit the electrostatic sector 4 along deflected paths. Depending on the particle energy, the deflected paths are rotated. a circle is not. which point, which is called the center of chromatic variation.
    Similarly, magnetic sector 5 has its own chromatic center, which must meet under the corresponding
    angle of incidence J, which are close to one another of energies and the same mass, after the completion of their deviation, i.e. at the same point of the Local plane 17 and at the same angle (along the coincident trajectory of m), whatever the energy. in the field of the axis ± & V, Thus, complete compensation (first order) of the energy dispersion of the magnetic prism is achieved. There are chromatic rotation centers. as many as different masses.
    However, if the deviation of the trajectories at the input of sector 5 is simply proportional to the difference in energy with the coefficients of proportionality, the same for all models, and these trajectories all converge at one point of the Focal plane 17 for a given mass, then the trajectories of the particles with -., personal energy will have a rational deviation,,
    According to another characteristic of the invention, means are provided for conjugating two centers of chromatic dissolution of the electrostatic sector 4 and magnetic sector-5. This can be easily accomplished by a corresponding increase with the aid of a quadrupole 14 than with full-effect correction of the chromatic or energy dispersion of a particle beam of a single mass. , with, this quadrupole is placed so that. other trajectories with corresponding deviations. to the particles of other masses. - Now consider the correction of the aberrations of the holes in the second. The first order, which appears at the level of electrostatic sector 4. This correction is mainly carried out by the first six-terminal 18, however, the first six-terminal 1.8 works in close contact with the element of the Spectrometer itself, as well as with its block 1 transmission optics
    In order to form a representation of the optical transmission and the input of the spectrometer, first of all, we reversal K (lig. 1 2, 3, 6, 7,
    The beam of charged particles applied to the entrance to block 1 of the transmitting optics has a narrowing in a point source 2. This ion beam consists of particles of different mass, having different kinetic energies that are not much different from one another.
     1600645
    The average value of this energy, like
    ten
    earlier, we denote by the letter V, expressed in electron volts, and its dispersion - through +,
    This beam, in principle, has a rotational symmetry at a point, a point source 2, and may consist of secondary particles emitted by a sample exposed to a beam of primary ions concentrated on the surface of the sample.
    The first unipotential electrostatic lens 19 provides an image of point 2 at point 20. A plate 21 may be provided around this point, allowing for possible re-centering of the beam on the optical axis.
    After the first lens 19 and, if required, a slit lens 22 is positioned after the centering plates 21. The slit lens 22 shows that the slit lens has no effect on the trajectories of the ions lying in the radial plane. And vice versa a cross-section (Fig. 3 and 7) of the slit lens 22 reduces these trajectories to the narrowing point 23.
    A second electrostatic lens 24 p is installed after the shawl lens 22.
    In the radial plane (Figures 2 and 6), Inza 24 gives an image of points 2 and 20 at point 25, located at the level of the entrance slit 3 and centered a of its axis.
    In the vertical section (Figures 3 and 7), the lens 26 is placed so that its axis is close to point 23. Consequently, that lens produces parallel beams or trajectories that unfold along the passage slit 3 in its large size (Figure 7) .
    20
    25
    in c to c or j5
    dr ni ta pushe si ko ko re io
    to shcha tha
    35
    40
    Thus, an increase at the level of the entrance slit 3 of the radial plane is obtained by influencing the excitation potential of the electrostatic lenses 19 and 26.
    Independent control of the trajectories located in the vertical plane (Figs. 3 and 7) is achieved with a slit lens 22.
    A spectral electrostatic lens 27 is installed on the one side at the entrance of the spectrometer in front of the entrance slit 3, which makes it possible to control the post-acceleration, and after it the first six-pole 18.
    ten
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    P
    20
    25
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    dg
    A lens 28 in a vertical section of a particle beam serves to narrow the particle flux at a point located in front of the electrostatic sector 4. The first six-pole 18 is centered on the level of this narrowing.
    A six-pole 18 is installed to Compensate for the aberrations of second-order holes created by the electro-static sector 4 for trajectories located in the radial plane. First of all, it does not have any effect on the trajectories arranged in the vertical section and does not make any changes in them, including type B aberrations, due to the fact that the beam narrowing in this section is in the center six-mole.
    Lens 28 After Acceleration plays a friend “) role, concludes with a change in the opening angle of the spectrometer itself. Accordingly, the beam narrowing produced by the transmitting optics unit, at point 25 at the level of the entrance slit in the radial plane, is transferred to point 27 by the lens after ablation 28. This makes it possible to increase the brightness of the spectrometer after eliminating the most significant aberrations. As a result of post-acceleration, the energy of the ions V is converted to the energy Vp.
    In practice, the front main plane of the lens 28 After acceleration is placed in the plane of the entrance slit 4 so that the spectrometer sees the entrance slit located at point 29 in the rear main plane of the lens 28. In such a spectrometer, the Gaussian image remains unchanged. For this resolving power, only the opening angle of the hole increases.
    As indicated earlier, the spectrometer is set so that the rear main focus of the lens 28 After acceleration is in the center of the six-pole 18, at point 30.
    In addition, after acceleration, the energy dispersion of the V / V ratio is reduced to
    35
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    V / VP, which, in turn, leads to a decrease in mixed aberrations and aberrations in (DM / UR). .
    In order to simplify the description, the applicants chose the ratio WVp on the order of one quarter, which required for the editing of negative ions energy
    eleven.
    order of J5 kV and the calculation of all wires of the spectrometer z chains, located after the lens 28 after acceleration, for a voltage of +15 kV, v
    The spectrometer has a second six-pole 6, located after the electrostatic sector 4 and centered on the actual image of the entrance slit 3, which gives the electrostatic sector A in the radial plane. This reduces the mixed aberrations of the orifice and; chromatic aberration for traktoko1600645
    ten
    Syria, located in a radial-55 three-port network 14.
    the same as the magnetic one is placed on its pole 31, so as to create conditions for tilting chromatically to obtain a parallel to the magnetic tantalizing slit for the correlators of the quadrupole section. After that the hole 16, and the lyus hole 12, is placed
    20
    thirty
    bones, while ensuring accurate compensation for the selected mass. Centering the six-pole J 2 at point 13 allows for the correction of mixed aberrations, without adjusting for this a six-pole 18, which corrects the aberrations of the orifice (independence of adjustments)
    In the example described here, pea-. In accordance with the invention, energy filtering is performed prior to the transmitting optics unit.
    In one embodiment, it is performed at the level of a second pole-pole: nick 12. Thus, in this embodiment, the spectrometer has two pole-rims framing the Energy filtering slot (not shown).
    After the second six-pole 12, a quadruple 31, an entrance lens 15, aperture slot 6, and finally a magnetic sector 5 are located.
    FIG. -1, 2.4. some details of the magnetic sector are shown. This sector has Magshug (not shown), which interacts with two pole tips 32 and 33, the shape of which is shown on the views of the device in the radial plane.
    Regardless of getting different. the corrections already described above, the invention makes it possible to greatly facilitate these corrections by making them using adjustments that do not require moving the individual elements of the spectrometer and which, if possible, are independent of one another.
    For this, the spectrometer is assembled and adjusted in the following order:
    First of all, the electrostatic sector 4 related to the sectors of spherical type is put in place, so
    Before the electrostatic 4, a pinhole is chosen on the particles in the selected focus, in the vertical 28 after acceleration the second electrostatic slit lens 22, the rotor and finally the 25 electrostatic. All these elements are in advance specified, which will not be.
    After that, the last adjustments, in the following order: the four channels are controlled so that the energy of the trajectory is electrostatically given
    The lens, after acceleration, regulates the constriction t in Ponek 14 and, the traces of the six-terminal 12 provides a pair of plane beams of the quadrupole g5 to compensate for the possibilities occupied
    The silk lens is regulated in such a way that h is located in nickname 18.
    40
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    55
    Specialist sing in this way, ok regulated by the change of mutual elements.
    In the same way, there is a collection from the magnetic output.
    12
    the same as the magnetic sector 5. After that, the four-quadrupole 31 is put in its place in order to create conditions for the corresponding inclination of the chromatic trajectories and to obtain parallelism of the beam entering the magnetic sector. Then, a slit lens 15 is installed, which serves to correct the divergence of the quadrupole 22 in a vertical section. After this, the slit of the opening 16 is installed, as well as the second pole and the pole 12, placed in the Focus of the quadrupole 14.
    0
    thirty

    In front of the electrostatic sector 4, a pinhole 18, centered at a preselected point, as in focus, in vertical section, after acceleration lens 28, the entrance shell 3, the second electrostatic lens 26, the slit lens 22, the centering plate 21 and, finally, the first unipotential electrostatic lens .19. All of these elements may be placed in predetermined positions, which will not be changed in the future.
    After that, additional adjustments are made, which are carried out in the following order: the quadrupole 31 is adjusted so that the trajectories dispersed in energy outgoing from the electrostatic sector 4 are imparted to the corresponding deviation.
    The lens after acceleration with its elements is adjusted so that the point 13. The constriction was in the focus of the quadrupole 14 and, therefore, in the center of the six-pole 12. This adjustment ensures parallelism in the radial plane of the beam exiting the four-pole 14, and allows the combination 5 to compensate for possible position defects occupied by the four-pole 14.
    The transfer lens 22 of the transmission optics is adjusted so that the 30-constriction point is in the center of the pinhole 18.
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    The skilled person will understand that the device is thus fully adjusted without any change in the relative position of its elements.
    Similarly, there is no need to collect rejected particles at the exit of the magnetic sector 5. Hour 131600645
    Particles with different masses come on the same plane 10.
    The particle separator according to the invention will allow the use of a LottaLic plate on a spectrographic sample for collecting particle deflection and mass distribution analysis.
    According to the invention, preference is given to the expansion in the Focal Plane of 10 rows of individual collectors, for example, like: electronic multipliers, whose entrance surfaces
    Post-accelerated electrode 28, 8 NM thick, with a hole having an inner diameter of 14 mm, insulated with an aluminum cylinder. This dis has a potential of +10 kV when working in
    sensitive to charged shocks
    particles emerging from the magnetic secto-) 5 post-accelerator quality, while
    ra 5. elements located in front
    14
    Mass Spectrometer 2:
    the entrance slit - 3 is a rectangular hole with a size of 0.024–0.8 ppm (with active acceleration), having a resolution of the mass of M / DM 4000. The greater axis of the shelf is perpendicular to the radial plane. Gap dimensions are adjustable in axes X and Y)
    Post-accelerated electrode 28 is a disk with a thickness of 8 NM with a hole having an inner diameter of 14 mm, insulated with an aluminum cylinder. This drive has a potential of +10 kV when working in.
    We now proceed to the description of a particular example implementation of the invention, using Fig. 8 and the following
    the parts have a reference voltage of + 15 kV, a six-pocket 18 - the width of a cylindrical input beam, negative ions of 20 rods with a diameter of 8 and an average energy of 5 kV form a beam of 36 mm. Their axes are evenly distributed over a cylindrical surface with a diameter of 24 MN. Potential difference
    rotation, having a narrowing at the point of the ion source 2. The sub-angle at the vertex has about 10 radars of resolution M / JM of the order of 4000. 25 alternately. Center of a six-port network. The unit of transmitting optics includes: it is 52 mm after the electrode 28
    two adjacent rods is +36 V
    Electrostatic lens 19 — three round electrodes with central holes 4 mm in diameter. The central electrode has a potential of 4670 V and the other two electrodes, installed on one and the other side of the central electrode, have the potential of mass;
    The centering plates 21 are four stainless steel plates having an active surface 18x2 mm in size, creating a square channel. The distance between the opposite plates is 3 mm. Their center is located at the level of the narrowing of the ion beam,
    slit lens 22 — three electrodes with rectangular apertures, the major axis of which lies in the radial plane. The central electrode is dimensioned, and the other two electrodes are mm. The central electrode, which receives a voltage of –5 kV, is set at a distance of 66.5 mm from the axis of the lens 22.
    The electrostatic lens 22 is identical to lens 19, the difference between them is only that its central electrode has a potential of 4310 V. This electrode is located 36 mm from the center of the shear lens 22 and 30 mm from the input lens 3, located above .
    alternately. The six-pole center is 52 mm after electrode 2
    two adjacent rods is +36 V
    and 43 mm in front of the entrance plane of the electrostatic sector;
    electrostatic sector 4 - angle
    deviation 90. Two concentric uchasugka spheres with radii of 94 and 106 mm. The potential difference applied to the inner and outer spheres is + 4819, in B. There are protective gaps at the entrance and exit to limit the leakage of the electric field;
    six-pole 12 is the same as six-pole 18. The only difference is that the length of the rods is 72 mm, and the potential difference is +1702.5 V. The center of the six-pole is 77 mm after the output CTOpoiibi electrostatic sector 4;
    quadrupole 14 - four cylindrical rods with a diameter of 24 mm and a length of 100 MN. The axes of these rods are evenly distributed over a cylindrical surface with a diameter of 46 mm. The potential difference alternately is +46.4 V. Rods with a negative potential must lie in the radial plane;
    the slit lens 15 has the same design as the lens 22. The central electrode has an opening of i4f70 mm in size, the electrodes located along the .kram have holes
    size mm. The central electrode has the correspondence with a focal length of 173 mm. It is 119 mm behind the center of the four-pole field.
    the slot of the hole 16 has dimensions, 7 for mass resolution M / BM. The major axis of the neck is located in the radial plane;
    Magnetic sector 5 is a magnetic circuit made of mild steel with a U-shaped cross section. The interglacial magnet space is 8 mm. Useful radius of the trajectory - from 70 to 350 mm. Magnetic induction can be adjusted to 1 T accuracy.
    The angle of the entrance side is 26 56 (tg). . The angle of deviation is 90. Exit side angle Q / 2 45. Angle of focus plane 10 53 3.
    The magnetic circuit has the potential of mass, but non-magnetic electrodes placed inside, the HMefOT potential of +15 kV when working as AFTER; Magnetic shunt, limits the leakage of the floor from the input side of the magnetic sector. On the upper part of the plane 10 of the Focusing there is a node of a multi-collector consisting of an ion-electronic transform (2 le post-electron multipliers.
    Optical elements (with the exception of a magnet) are mounted on a structural part made of stainless steel, which bixes the mutual arrangement of various devices and serves as a vacuum chamber. A group of cryogenic pumps provides the required ultra-high vacuum. The magnet is connected to the preceding device of an elastic hermetic systb; mine, which includes elements of the mechanical alignment of the optical axes along one line. .
    In the following description, refer to Figs. 9, 10, which illustrate the operation of the system with and without acceleration.
    Up to the slit lens 22, the trajectories remain the same as before and are in the radial plane and. vertical section.
    FIG. 9 shows that in radial. other plane without acceleration
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    It does not pass through the slit lens 22 to converge to the second electrostatic lens 26 and Focus at point 25. However, the lens — the post-acceleration electrode 28, having a potential of up to 10 kV, creates an imaginary Focus at the point 29 along the rays in the spectrometer. Thus, from this point, find the trajectories coming into the multi-port 18. For the specific numerical values of the quantities described earlier, the distance between points 29 and 25 is 11 mm.
    In the vertical section (Fig. 9), these trajectories are deformed with a slit lens 22. At the same time, they remain parallel to the plane 33 (Fig, 8), after which they slightly converge so as to pass through the slot hole 3 in the plane 34 (Fig. 9) and, thus, obtain the final direction going to the point of constriction 30, in which the six-pole network is centered 8.
    The focal lengths of these lenses are mm.
    eleven
    0
    for lens 19 f for lens 22 f 13 for lens 24 f 14. for lens 28 f 21
    15 9.44 19.88 97
    five
    0
    When operating without acceleration (Fig. 10), there is only one effect of the collecting lens created by the lens 28. Consequently, point 25 remains associated with point 30, from which the trajectories that follow the lens 28 are located in the radial plane.
    In the vertical section 10, the adjustment of the optical transmission is changed so that the trajectories begin to converge immediately after leaving the second electrostatic lens 26. 5 They pass through the entrance slit. 3, a little earlier, converge to the level of the lens 28 and finally finally converge at the same point 29 of the constriction as in the previous case.
    The magnitude of the focal lengths at the same time:
    f 11 and f 14 remain the same;
    for lens 22 f 13 8.30 mm; for the lens 28 f 21,139.09 mm.
    If, when working with acceleration, the increase at the level of the inlet is one, then, when working without acceleration, between the images located at point 29 and
    0
    five
    17
    the image at point 30 has an increase of 1.32 times.
    It follows that the post-acceleration, accompanied by 3d5die rTOM convergence, caused by an additional electrode, corresponds to the peculiarities of incomplete adjustment, which the device has according to the invention — only the magnitude of the electrical voltages changes.
    Some of the elements of the spectrometer described above can be replaced by equivalent elements. Thus, the only quadrupole J4 can be replaced by two four-pole networks. It is possible to use other elements equivalent to a quadrupole, as well as six-pole, electrostatic lenses and jjHH3aM. -. . . .
    sixteen
    F
    formula and invention
    权利要求:
    Claims (5)
    [1]
    1. A mass spectrometer, an ion source with an exit slit, an electrofocusing optics unit, an electrostatic sector analyzer, a lens for feeding a magnetic avalitator parallel in the radial plane of a particle beam, and a magnetic analyzer with an input shell and a flat input boundary that is not orthogonal to the ion beam the optical axis of the mass spectrometer, the flat output boundary located in a plane passing through the intersection of the input boundary with the ion optical axis of the mass spectrometer, characterized in that tim resolution and throughput by reducing the aberration of second order aperture, the angle between the entrance boundary of the magnetic analyzer and
    -
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    18
    ten
    20
    , the normal sr of the ion-optical axis of the mass spectrometer on the side of the beam deflection and the beam deflection angle 0 in the magnetic indicator satisfy the relation
    tgS / 2. tg (e- 6) 2.
    [2]
    2.Mas spectrometer according to claim 1, which is characterized by the fact that the unit of electro-focusing optics contains two electrostatic lenses 1C located up to the output stage of the source by the Focus in the radial plane
    5 in the region of the exit slit of the ion source and a slit lens located between them to create a particle beam parallel to the axial plane in the region of the exit shell of the ionic HCTO-iHHKa.
    [3]
    3, Mass spectrometer according to claims 1 and 2, characterized in that the block of electrofocusing optics after the exit slit of the ion source
    25 contains the Locus lens after acceleration, in the Focus of which a six-pole lens is located,
    [4]
    4. The mass spectrometer according to claims 1-3, which is based on the fact that it
    30 contains a second six-pole lens located after the electrostatic sector analyzer at its djoKyca point,
    [5]
    5. The mass spectrometer according to claim 1, which is characterized by the fact that the lens for transferring a paraple fiber magnetic analyzer in the radial plane of the particle beam is made in the form of a quadrupole. rear focus of which matches
    4Q with the Focus of the electrostatic sector analyzer in the radial plane, with means after quadrupoles installed to compensate for the divergence of the beam in the axial plane.
    45 I
    35
    FIG.
    31 75 and
    Fig /
    115
    /
    3k
    t / 3, Z J
    35
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    .gv
    21
    NH
    22
    ,
    25
    ©
     t.
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    , 20 .f1
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    7
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    同族专利:
    公开号 | 公开日
    EP0151078A3|1986-08-20|
    JPS6110843A|1986-01-18|
    FR2558988A1|1985-08-02|
    JPH0359544B2|1991-09-10|
    FR2558988B1|1987-08-28|
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    EP0151078B1|1989-12-27|
    US4638160A|1987-01-20|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    NL7004207A|1969-07-30|1971-02-02|
    JPS4864989A|1971-12-10|1973-09-07|
    JPS5829577B2|1980-06-13|1983-06-23|Nippon Electron Optics Lab|
    US4389571A|1981-04-01|1983-06-21|The United States Of America As Represented By The United States Department Of Energy|Multiple sextupole system for the correction of third and higher order aberration|DE3522340C2|1985-06-22|1990-04-26|Finnigan Mat Gmbh, 2800 Bremen, De|
    JPS6477853A|1987-09-18|1989-03-23|Jeol Ltd|Mapping type ion microanalyzer|
    JPH0578903B2|1988-07-14|1993-10-29|Nippon Electron Optics Lab|
    JPH02304854A|1989-05-19|1990-12-18|Jeol Ltd|Simultaneous detecting type mass spectrometer|
    US5019712A|1989-06-08|1991-05-28|Hughes Aircraft Company|Production of focused ion cluster beams|
    JPH03269943A|1990-03-20|1991-12-02|Jeol Ltd|Simultaneous detection type mass analyzer|
    FR2666171B1|1990-08-24|1992-10-16|Cameca|HIGH TRANSMISSION STIGMA MASS SPECTROMETER.|
    JP3727047B2|1999-07-30|2005-12-14|住友イートンノバ株式会社|Ion implanter|
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    FR2942072B1|2009-02-06|2011-11-25|Cameca|ACHROMATIC MAGNETIC MASS SPECTROMETER WITH DOUBLE FOCUSING.|
    LU92130B1|2013-01-11|2014-07-14|Ct De Rech Public Gabriel Lippmann|Mass spectrometer with optimized magnetic shunt|
    WO2017075470A1|2015-10-28|2017-05-04|Duke University|Mass spectrometers having segmented electrodes and associated methods|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    FR8401332A|FR2558988B1|1984-01-27|1984-01-27|HIGH-CLARITY MASS SPECTROMETER CAPABLE OF SIMULTANEOUS MULTIPLE DETECTION|
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